Inventor
HOUGE ERIK CHO
US16 patents
⚠️ This page may combine multiple inventors who share the name “HOUGE ERIK CHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGERE SYSTEMS INC
14 patentsUS6651226B2Nov 18, 2003
Process control using three dimensional reconstruction metrology
AGERE SYSTEMS INC29 citations92
US6641746B2Nov 4, 2003
Control of semiconductor processing
AGERE SYSTEMS INC48 citations88
US6714892B2Mar 30, 2004
Three dimensional reconstruction metrology
AGERE SYSTEMS INC15 citations83
US6625250B2Sep 23, 2003
Optical structures and methods for x-ray applications
AGERE SYSTEMS INC14 citations83
US6750447B2Jun 15, 2004
Calibration standard for high resolution electron microscopy
AGERE SYSTEMS INC8 citations72
US6606371B2Aug 12, 2003
X-ray system
AGERE SYSTEMS INC11 citations72
US6633032B2Oct 14, 2003
Mass spectrometer particle counter
AGERE SYSTEMS INC2 citations58
US6695572B2Feb 24, 2004
Method and apparatus for minimizing semiconductor wafer contamination
AGERE SYSTEMS INC4 citations57
US6899596B2May 31, 2005
Chemical mechanical polishing of dual orientation polycrystalline materials
AGERE SYSTEMS INC3 citations53
US6783426B2Aug 31, 2004
Method and apparatus for detection of chemical mechanical planarization endpoint and device planarity
AGERE SYSTEMS INC2 citations51
US6708574B2Mar 23, 2004
Abnormal photoresist line/space profile detection through signal processing of metrology waveform
AGERE SYSTEMS INC0 citations51
US6713409B2Mar 30, 2004
Semiconductor manufacturing using modular substrates
AGERE SYSTEMS INC0 citations50
US6534851B1Mar 18, 2003
Modular semiconductor substrates
AGERE SYSTEMS INC0 citations50
US6825467B2Nov 30, 2004
Apparatus for scanning a crystalline sample and associated methods
AGERE SYSTEMS INC0 citations40