Inventor
YOO JI-BEOM
KR14 patents
⚠️ This page may combine multiple inventors who share the name “YOO JI-BEOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
10 patentsUS10065402B2Sep 4, 2018
Method of manufacturing pellicle assembly and method of photomask assembly including the same
SAMSUNG ELECTRONICS CO LTD5 citations72
US9690190B2Jun 27, 2017
Pellicles and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD3 citations72
US11067887B2Jul 20, 2021
Apparatus for manufacturing pellicle
SAMSUNG ELECTRONICS CO LTD0 citations62
US6903500B2Jun 7, 2005
Field emitter device comprising carbon nanotube having protective membrane
SAMSUNG ELECTRONICS CO LTD4 citations61
US12346022B2Jul 1, 2025
Method of fabricating pellicle structure
SAMSUNG ELECTRONICS CO LTD0 citations54
US10747104B2Aug 18, 2020
Method of manufacturing pellicle and apparatus for assembling pellicle
SAMSUNG ELECTRONICS CO LTD0 citations51
US9753367B2Sep 5, 2017
Methods of fabricating pellicles using supporting layer
SAMSUNG ELECTRONICS CO LTD0 citations49
US10394117B2Aug 27, 2019
Pellicle film including graphite-containing thin film for extreme ultraviolet lithography
SAMSUNG ELECTRONICS CO LTD0 citations47
US10001700B2Jun 19, 2018
Pellicle film including graphite-containing thin film for extreme ultraviolet lithography
SAMSUNG ELECTRONICS CO LTD1 citations47
US10345698B2Jul 9, 2019
Method for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations39