Inventor
SHABALIN ANDREW
US12 patents
⚠️ This page may combine multiple inventors who share the name “SHABALIN ANDREW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED ENERGY IND INC
11 patentsUS7115185B1Oct 3, 2006
Pulsed excitation of inductively coupled plasma sources
ADVANCED ENERGY IND INC78 citations97
US6946063B1Sep 20, 2005
Deterioration resistant chambers for inductively coupled plasma production
ADVANCED ENERGY IND INC45 citations95
US6822396B2Nov 23, 2004
Transformer ignition circuit for a transformer coupled plasma source
ADVANCED ENERGY IND INC45 citations95
US6818257B2Nov 16, 2004
Method of providing a material processing ion beam
ADVANCED ENERGY IND INC68 citations94
US7245084B1Jul 17, 2007
Transformer ignition circuit for a transformer coupled plasma source
ADVANCED ENERGY IND INC41 citations92
US6724148B1Apr 20, 2004
Mechanism for minimizing ion bombardment energy in a plasma chamber
ADVANCED ENERGY IND INC49 citations92
US6927358B2Aug 9, 2005
Vacuum seal protection in a dielectric break
ADVANCED ENERGY IND INC40 citations91
US6451389B1Sep 17, 2002
Method for deposition of diamond like carbon
ADVANCED ENERGY IND INC43 citations91
US7241360B2Jul 10, 2007
Method and apparatus for neutralization of ion beam using AC ion source
ADVANCED ENERGY IND INC24 citations88
US10797613B1Oct 6, 2020
Power supply system with actively switched bus capacitor
ADVANCED ENERGY IND INC1 citations62
US7942112B2May 17, 2011
Method and apparatus for preventing the formation of a plasma-inhibiting substance
ADVANCED ENERGY IND INC0 citations41