P

Inventor

BETTES TED C

US6 patents
⚠️ This page may combine multiple inventors who share the name “BETTES TED C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILICON VALLEY GROUP

3 patents
US6238735B1May 29, 2001

Method of uniformly coating a substrate

SILICON VALLEY GROUP38 citations95
US5670210ASep 23, 1997

Method of uniformly coating a substrate

SILICON VALLEY GROUP91 citations95
US5954878ASep 21, 1999

Apparatus for uniformly coating a substrate

SILICON VALLEY GROUP31 citations92

ASML HOLDING NV

3 patents
US7030039B2Apr 18, 2006

Method of uniformly coating a substrate

ASML HOLDING NV11 citations82
US6977098B2Dec 20, 2005

Method of uniformly coating a substrate

ASML HOLDING NV17 citations82
US7018943B2Mar 28, 2006

Method of uniformly coating a substrate

ASML HOLDING NV5 citations60