Inventor
YEO IN-JUN
KR7 patents
⚠️ This page may combine multiple inventors who share the name “YEO IN-JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS6843257B2Jan 18, 2005
Wafer cleaning system
SAMSUNG ELECTRONICS CO LTD16 citations83
US6543079B1Apr 8, 2003
Wafer cleaning apparatus
SAMSUNG ELECTRONICS CO LTD13 citations81
US6651285B2Nov 25, 2003
Wafer cleaning apparatus
SAMSUNG ELECTRONICS CO LTD7 citations71
US7089947B2Aug 15, 2006
Apparatus and method for cleaning a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD2 citations62
US7017597B2Mar 28, 2006
Megasonic cleaning apparatus for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations62
US6562727B2May 13, 2003
Methods and compositions for removal of anti-reflective layers using fluorine containing compounds, oxidants, and water
SAMSUNG ELECTRONICS CO LTD0 citations50