Inventor
LEE JA-WOO
KR15 patents
⚠️ This page may combine multiple inventors who share the name “LEE JA-WOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS7227334B2Jun 5, 2007
Charging apparatus used with a mobile robot
SAMSUNG ELECTRONICS CO LTD119 citations97
US10770337B2Sep 8, 2020
Lift pin assembly, substrate support apparatus and substrate processing apparatus having the same
SAMSUNG ELECTRONICS CO LTD10 citations83
US8021071B2Sep 20, 2011
Compliant joint
SAMSUNG ELECTRONICS CO LTD7 citations83
US7099743B2Aug 29, 2006
Two-legged walking robot
SAMSUNG ELECTRONICS CO LTD20 citations83
US11501994B2Nov 15, 2022
Substrate processing apparatus including edge ring
SAMSUNG ELECTRONICS CO LTD2 citations72
US9773645B2Sep 26, 2017
Remote plasma generator using ceramic
SAMSUNG ELECTRONICS CO LTD4 citations70
US10665490B2May 26, 2020
Apparatus and methods for edge ring replacement, inspection and alignment using image sensors
SAMSUNG ELECTRONICS CO LTD5 citations68