Inventor
SEGER LAWRENCE
US3 patents
Patents
3 patentsUS7101654B2Sep 5, 2006
Norbornene-type monomers and polymers containing pendent lactone or sultone groups
PROMERUS LLC24 citations91
US7341818B2Mar 11, 2008
Norbornene-type monomers and polymers containing pendent lactone or sultone groups
PROMERUS LLC5 citations61
US7422836B2Sep 9, 2008
Dissolution rate modifiers for photoresist compositions
PROMERUS LLC4 citations60