Inventor

SHI RUIFANG

US3 patents

⚠️ This page may combine multiple inventors who share the name “SHI RUIFANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHI RUIFANG

2 patents

US8103086B2Jan 24, 2012

Reticle defect inspection with model-based thin line approaches

SHI RUIFANG7 citations79

US8611637B2Dec 17, 2013

Wafer plane detection of lithographically significant contamination photomask defects

SHI RUIFANG6 citations68

KLA TENCOR TECH CORP

1 patent

US7493590B1Feb 17, 2009

Process window optical proximity correction

KLA TENCOR TECH CORP17 citations82