Inventor
LEE YOUNG-DONG
KR13 patents
⚠️ This page may combine multiple inventors who share the name “LEE YOUNG-DONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS7381292B2Jun 3, 2008
Inductively coupled plasma generating apparatus incorporating serpentine coil antenna
SAMSUNG ELECTRONICS CO LTD12 citations83
US8039772B2Oct 18, 2011
Microwave resonance plasma generating apparatus and plasma processing system having the same
SAMSUNG ELECTRONICS CO LTD6 citations56
US7999474B2Aug 16, 2011
Flat lamp using plasma discharge
SAMSUNG ELECTRONICS CO LTD0 citations51
US7615928B2Nov 10, 2009
Light emitting device using plasma discharge
SAMSUNG ELECTRONICS CO LTD0 citations51
US10134567B2Nov 20, 2018
Microwave plasma processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
APPLIED MATERIALS INC
5 patentsUS12362149B2Jul 15, 2025
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC1 citations74
US11854771B2Dec 26, 2023
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC1 citations72
US11094508B2Aug 17, 2021
Film stress control for plasma enhanced chemical vapor deposition
APPLIED MATERIALS INC3 citations72
US10312475B2Jun 4, 2019
CVD thin film stress control method for display application
APPLIED MATERIALS INC3 citations72
US10751765B2Aug 25, 2020
Remote plasma source cleaning nozzle for cleaning a gas distribution plate
APPLIED MATERIALS INC0 citations41
PARK TAI-SU
2 patentsUS8835275B2Sep 16, 2014
Semiconductor devices having nitrided gate insulating layer and methods of fabricating the same
PARK TAI-SU6 citations69
US9312124B2Apr 12, 2016
Methods of fabricating gate insulating layers in gate trenches and methods of fabricating semiconductor devices including the same
PARK TAI-SU0 citations36