Inventor
LITVAK HERBERT E
US22 patents
⚠️ This page may combine multiple inventors who share the name “LITVAK HERBERT E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUXTRON CORP
11 patentsUS5695660ADec 9, 1997
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
LUXTRON CORP98 citations99
US5499733AMar 19, 1996
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
LUXTRON CORP139 citations99
US6077452AJun 20, 2000
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
LUXTRON CORP56 citations96
US6010538AJan 4, 2000
In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link
LUXTRON CORP216 citations95
US5308447AMay 3, 1994
Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer
LUXTRON CORP77 citations93
US6426232B1Jul 30, 2002
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
LUXTRON CORP35 citations92
US6110752AAug 29, 2000
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
LUXTRON CORP17 citations92
US5891352AApr 6, 1999
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
LUXTRON CORP27 citations92
US5190614AMar 2, 1993
Method of endpoint detection and structure therefor
LUXTRON CORP41 citations88
US5946082AAug 31, 1999
Interference removal
LUXTRON CORP5 citations72
US5786886AJul 28, 1998
Interference removal
LUXTRON CORP11 citations72
LIGHTWIND CORP
4 patentsUS7072028B2Jul 4, 2006
Method and apparatus for chemical monitoring
LIGHTWIND CORP16 citations91
US7580119B2Aug 25, 2009
Method and apparatus for chemical monitoring
LIGHTWIND CORP5 citations72
US7217371B2May 15, 2007
Optical control interface between controller and process chamber
LIGHTWIND CORP3 citations62
US7456939B2Nov 25, 2008
Method and apparatus for chemical monitoring
LIGHTWIND CORP4 citations61
LAM RES CORP
3 patentsUS6254459B1Jul 3, 2001
Wafer polishing device with movable window
LAM RES CORP143 citations96
US6068539AMay 30, 2000
Wafer polishing device with movable window
LAM RES CORP200 citations96
US6612902B1Sep 2, 2003
Method and apparatus for end point triggering with integrated steering
LAM RES CORP10 citations74