Inventor
ZAMBON PAOLO
US10 patents
⚠️ This page may combine multiple inventors who share the name “ZAMBON PAOLO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
6 patentsUS6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6392743B1May 21, 2002
Control technique for microlithography lasers
CYMER INC64 citations95
US6320892B1Nov 20, 2001
Energy efficient lithography laser
CYMER INC21 citations92
US6882674B2Apr 19, 2005
Four KHz gas discharge laser system
CYMER INC31 citations90
US7209507B2Apr 24, 2007
Method and apparatus for controlling the output of a gas discharge MOPA laser system
CYMER INC13 citations83
US7277464B2Oct 2, 2007
Method and apparatus for controlling the output of a gas discharge laser system
CYMER INC6 citations57