Inventor
TAKAHASHI KIICHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI KIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS5857848AJan 12, 1999
Transfer apparatus and vertical heat-processing system using the same
TOKYO ELECTRON LTD27 citations92
US9349589B2May 24, 2016
Vacuum processing apparatus and vacuum processing method
TOKYO ELECTRON LTD9 citations84
US6957956B2Oct 25, 2005
Vertical heat treating equipment
TOKYO ELECTRON LTD12 citations81
US10294565B2May 21, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US7905700B2Mar 15, 2011
Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus
TOKYO ELECTRON LTD4 citations61
US7762809B2Jul 27, 2010
Heat treatment apparatus
TOKYO ELECTRON LTD3 citations60
US8565911B2Oct 22, 2013
Thermal processing apparatus, thermal processing method, and storage medium
TOKYO ELECTRON LTD2 citations58
US10837110B2Nov 17, 2020
Substrate processing apparatus and method for processing a substrate
TOKYO ELECTRON LTD0 citations41
US10428425B2Oct 1, 2019
Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium
TOKYO ELECTRON LTD0 citations41
US10549305B2Feb 4, 2020
Support structure for suspended injector and substrate processing apparatus using same
TOKYO ELECTRON LTD0 citations40
US10002417B2Jun 19, 2018
Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus
TOKYO ELECTRON LTD0 citations33