Inventor
ITOU MASAAKI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “ITOU MASAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
6 patentsUS5222112AJun 22, 1993
X-ray pattern masking by a reflective reduction projection optical system
HITACHI LTD134 citations97
US5408320AApr 18, 1995
Workpiece having alignment marks for positioning a pattern at a different pitch to be formed thereon, and method for fabricating the same
HITACHI LTD29 citations92
US5305364AApr 19, 1994
Projection type X-ray lithography apparatus
HITACHI LTD38 citations92
US5272744ADec 21, 1993
Reflection mask
HITACHI LTD33 citations92
US5200798AApr 6, 1993
Method of position detection and the method and apparatus of printing patterns by use of the position detection method
HITACHI LTD14 citations73
US4984259AJan 8, 1991
X-ray exposure apparatus
HITACHI LTD2 citations62