Inventor
YU TING-YANG
TW4 patents
Patents
4 patentsUS12032295B2Jul 9, 2024
Optical lithography system and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11960211B2Apr 16, 2024
Optical lithography system and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11158600B2Oct 26, 2021
Lithography process for semiconductor packaging and structures resulting therefrom
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US11143965B2Oct 12, 2021
Optical lithography system for patterning semiconductor devices and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48