Inventor

STOWELL ROBERT MARSHALL

US9 patents

⚠️ This page may combine multiple inventors who share the name “STOWELL ROBERT MARSHALL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

5 patents

US9988734B2Jun 5, 2018

Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte

NOVELLUS SYSTEMS INC1 citations48

IBM

2 patents

US5801381ASep 1, 1998

Method for protecting a probe tip using active lateral scanning control

IBM29 citations91

US5773824AJun 30, 1998

Method for improving measurement accuracy using active lateral scanning control of a probe

IBM20 citations88

LAM RES CORP

2 patents

US10811299B2Oct 20, 2020

Wafer chuck assembly

LAM RES CORP9 citations80

US12189369B2Jan 7, 2025

In-situ sensor-fusion with artificial intelligence

LAM RES CORP0 citations47

STOWELL ROBERT MARSHALL

NOVELLUS SYSTEMS INC

Lipseals and contact elements for semiconductor electroplating apparatuses

CMP apparatus and method

Lipseals and contact elements for semiconductor electroplating apparatuses

Lipseals and contact elements for semiconductor electroplating apparatuses

Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte

IBM

Method for protecting a probe tip using active lateral scanning control

Method for improving measurement accuracy using active lateral scanning control of a probe

LAM RES CORP

Wafer chuck assembly

In-situ sensor-fusion with artificial intelligence