Inventor

GARNER STEPHEN C

US5 patents

Patents

5 patents

US11557466B2Jan 17, 2023

Tuneable uniformity control utilizing rotational magnetic housing

APPLIED MATERIALS INC2 citations71

US12555741B2Feb 17, 2026

Magnetic housing systems

APPLIED MATERIALS INC0 citations61

US11587764B2Feb 21, 2023

Magnetic housing systems

APPLIED MATERIALS INC1 citations61

US11560626B2Jan 24, 2023

Substrate processing chamber

APPLIED MATERIALS INC0 citations60

US11959174B2Apr 16, 2024

Shunt door for magnets in plasma process chamber

APPLIED MATERIALS INC1 citations59