Inventor
JUNG YOU SUN
KR3 patents
Patents
3 patentsUS11701693B2Jul 18, 2023
Substrate processing device comprising door unit having inclined surface
KCTECH CO LTD0 citations58
US11883857B2Jan 30, 2024
Cleaning solution detection device
KCTECH CO LTD0 citations56
US12451370B2Oct 21, 2025
Substrate processing system with vertical arrangement structure
KCTECH CO LTD0 citations47