Inventor
OZAKI MASAKI
JP5 patents
Patents
5 patentsUS11664261B2May 30, 2023
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD2 citations71
US11328948B2May 10, 2022
Electrostatic chuck device and method of manufacturing electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD2 citations65
US11887877B2Jan 30, 2024
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD1 citations60
US11848223B2Dec 19, 2023
Electrostatic chuck device and method for producing electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD1 citations60
US11471987B2Oct 18, 2022
Electrostatic chuck device and electrostatic chuck device manufacturing method
SUMITOMO OSAKA CEMENT CO LTD1 citations57