Inventor
HIROSE KATSUHITO
JP8 patents
Patents
8 patentsUS11873560B2Jan 16, 2024
Abnormality detection system and control board
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US8834631B2Sep 16, 2014
Processing apparatus and valve operation checking method
TOKYO ELECTRON LTD5 citations72
US9725804B2Aug 8, 2017
Processing apparatus
TOKYO ELECTRON LTD4 citations71
US11081322B2Aug 3, 2021
Film forming apparatus, cleaning method for film forming apparatus and recording medium
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US12087562B2Sep 10, 2024
Substrate processing apparatus, substrate processing system, and abnormality detection method
TOKYO ELECTRON LTD2 citations62
US9708711B2Jul 18, 2017
Processing apparatus and process status checking method
TOKYO ELECTRON LTD0 citations51
US11276592B2Mar 15, 2022
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations48
US10815567B2Oct 27, 2020
Deposition device and deposition method
TOKYO ELECTRON LTD0 citations41