Inventor
LIM KYEONG BIN
KR4 patents
Patents
4 patentsUS11127654B2Sep 21, 2021
Semiconductor device and a manufacturing method thereof
SAMSUNG ELECTRONICS CO LTD5 citations79
US10763243B2Sep 1, 2020
Substrate bonding apparatus
SAMSUNG ELECTRONICS CO LTD1 citations60
US11302540B2Apr 12, 2022
Substrate support device and substrate cleaning device including the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US12199014B2Jan 14, 2025
Semiconductor device and a manufacturing method thereof
SAMSUNG ELECTRONICS CO LTD0 citations58