Inventor
MOON MIN-YEONG
US9 patents
Patents
9 patentsUS11530913B2Dec 20, 2022
Methods and systems for determining quality of semiconductor measurements
KLA CORP2 citations71
US11604420B2Mar 14, 2023
Self-calibrating overlay metrology
KLA CORP2 citations70
US12181271B2Dec 31, 2024
Estimating in-die overlay with tool induced shift correction
KLA CORP2 citations69
US11880142B2Jan 23, 2024
Self-calibrating overlay metrology
KLA CORP0 citations59
US11604063B2Mar 14, 2023
Self-calibrated overlay metrology using a skew training sample
KLA CORP1 citations59
US12209854B2Jan 28, 2025
Methods and systems for measurement of tilt and overlay of a structure
KLA CORP0 citations50
US12523968B2Jan 13, 2026
System and method for estimating measurement uncertainty for characterization systems
KLA CORP0 citations49
US12571724B2Mar 10, 2026
Single wafer orientation tool-induced shift cleaning
KLA CORP0 citations43
US12148639B2Nov 19, 2024
Correcting target locations for temperature in semiconductor applications
KLA CORP0 citations40