Inventor

WANG CHIEN-MEI

TW5 patents

⚠️ This page may combine multiple inventors who share the name “WANG CHIEN-MEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IND TECH RES INST

3 patents

US5858869AJan 12, 1999

Method for fabricating intermetal dielectric insulation using anisotropic plasma oxides and low dielectric constant polymers

IND TECH RES INST152 citations97

US6162583ADec 19, 2000

Method for making intermetal dielectrics (IMD) on semiconductor integrated circuits using low dielectric constant spin-on polymers

IND TECH RES INST89 citations93

US6242361B1Jun 5, 2001

Plasma treatment to improve DUV photoresist process

IND TECH RES INST14 citations73

UNITED MICROELECTRONICS CORP

2 patents

US6406978B1Jun 18, 2002

Method of removing silicon carbide

UNITED MICROELECTRONICS CORP11 citations73

US6621167B1Sep 16, 2003

Metal interconnect structure

UNITED MICROELECTRONICS CORP5 citations61