Inventor
HASHIGUCHI TATSUYA
JP3 patents
Patents
3 patentsUS5714625AFeb 3, 1998
Cyanooxime sulfonate compound
TOKYO OHKA KOGYO CO LTD143 citations98
US5800964ASep 1, 1998
Photoresist composition
TOKYO OHKA KOGYO CO LTD20 citations92
US5728504AMar 17, 1998
Positive photoresist compositions and multilayer resist materials using the same
TOKYO OHKA KOGYO CO LTD15 citations72