Inventor
TESAURO MARK R
US5 patents
Patents
5 patentsUS5834360ANov 10, 1998
Method of forming an improved planar isolation structure in an integrated circuit
ST MICROELECTRONICS INC19 citations91
US6339028B2Jan 15, 2002
Vacuum loadlock ultra violet bake for plasma etch
ST MICROELECTRONICS INC18 citations89
US6077387AJun 20, 2000
Plasma emission detection for process control via fluorescent relay
ST MICROELECTRONICS INC23 citations89
US6046483AApr 4, 2000
Planar isolation structure in an integrated circuit
ST MICROELECTRONICS INC8 citations72
US6752900B2Jun 22, 2004
Vacuum loadlock ultraviolet bake for plasma etch
ST MICROELECTRONICS INC2 citations59