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Inventor

DUNTON SAMUEL VANCE

US5 patents
⚠️ This page may combine multiple inventors who share the name “DUNTON SAMUEL VANCE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VLSI TECHNOLOGY INC

4 patents
US6224460B1May 1, 2001

Laser interferometry endpoint detection with windowless polishing pad for chemical mechanical polishing process

VLSI TECHNOLOGY INC35 citations90
US6028013AFeb 22, 2000

Moisture repellant integrated circuit dielectric material combination

VLSI TECHNOLOGY INC17 citations82
US6196900B1Mar 6, 2001

Ultrasonic transducer slurry dispenser

VLSI TECHNOLOGY INC9 citations72
US6103634AAug 15, 2000

Removal of inorganic anti-reflective coating using fluorine etch process

VLSI TECHNOLOGY INC6 citations59

KONINKL PHILIPS ELECTRONICS NV

1 patent
US6565416B2May 20, 2003

Laser interferometry endpoint detection with windowless polishing pad for chemical mechanical polishing process

KONINKL PHILIPS ELECTRONICS NV4 citations60