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Inventor
KUME MORIHIKO
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “KUME MORIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
2 patents
US6319331B1
Nov 20, 2001
Method for processing semiconductor substrate
MITSUBISHI ELECTRIC CORP
19 citations
89
US5946543A
Aug 31, 1999
Semiconductor wafer evaluating method and semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP
24 citations
85
RENESAS ELECTRONICS CORP
1 patent
US10134869B2
Nov 20, 2018
Method of manufacturing semiconductor device
RENESAS ELECTRONICS CORP
0 citations
36