Inventor

LEE WON MO

KR3 patents

⚠️ This page may combine multiple inventors who share the name “LEE WON MO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HYNIX SEMICONDUCTOR INC

2 patents

US7265054B2Sep 4, 2007

Chemical mechanical polishing method for manufacturing semiconductor device

HYNIX SEMICONDUCTOR INC9 citations69

US7344973B2Mar 18, 2008

Semiconductor device and method of manufacturing the same

HYNIX SEMICONDUCTOR INC0 citations47

SUMCO CORP

1 patent

US7833908B2Nov 16, 2010

Slurry composition for chemical-mechanical polishing capable of compensating nanotopography effect and method for planarizing surface of semiconductor device using the same

SUMCO CORP0 citations39