Inventor
FOVELL RICHARD CHARLES
US6 patents
⚠️ This page may combine multiple inventors who share the name “FOVELL RICHARD CHARLES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7846497B2Dec 7, 2010
Method and apparatus for controlling gas flow to a processing chamber
APPLIED MATERIALS INC37 citations90
US7775236B2Aug 17, 2010
Method and apparatus for controlling gas flow to a processing chamber
APPLIED MATERIALS INC25 citations90
US7975558B2Jul 12, 2011
Method and apparatus for gas flow measurement
APPLIED MATERIALS INC9 citations83
US7743670B2Jun 29, 2010
Method and apparatus for gas flow measurement
APPLIED MATERIALS INC10 citations83
US11043360B2Jun 22, 2021
Gas distribution plate assembly for high power plasma etch processes
APPLIED MATERIALS INC4 citations73