Inventor
GEOFFRION BRUNO
US13 patents
⚠️ This page may combine multiple inventors who share the name “GEOFFRION BRUNO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7846497B2Dec 7, 2010
Method and apparatus for controlling gas flow to a processing chamber
APPLIED MATERIALS INC37 citations90
US7775236B2Aug 17, 2010
Method and apparatus for controlling gas flow to a processing chamber
APPLIED MATERIALS INC25 citations90
US7722737B2May 25, 2010
Gas distribution system for improved transient phase deposition
APPLIED MATERIALS INC23 citations90
US7541292B2Jun 2, 2009
Plasma etch process with separately fed carbon-lean and carbon-rich polymerizing etch gases in independent inner and outer gas injection zones
APPLIED MATERIALS INC12 citations84
US7540971B2Jun 2, 2009
Plasma etch process using polymerizing etch gases across a wafer surface and additional polymer managing or controlling gases in independently fed gas zones with time and spatial modulation of gas content
APPLIED MATERIALS INC16 citations84
US7431859B2Oct 7, 2008
Plasma etch process using polymerizing etch gases with different etch and polymer-deposition rates in different radial gas injection zones with time modulation
APPLIED MATERIALS INC18 citations84
US6812153B2Nov 2, 2004
Method for high aspect ratio HDP CVD gapfill
APPLIED MATERIALS INC13 citations83
US7189639B2Mar 13, 2007
Use of germanium dioxide and/or alloys of GeO2 with silicon dioxide for semiconductor dielectric applications
APPLIED MATERIALS INC3 citations63
US6890597B2May 10, 2005
HDP-CVD uniformity control
APPLIED MATERIALS INC6 citations63
US7064077B2Jun 20, 2006
Method for high aspect ratio HDP CVD gapfill
APPLIED MATERIALS INC2 citations61