Inventor

BUCHBERGER DOUGLAS ARTHUR

US3 patents

⚠️ This page may combine multiple inventors who share the name “BUCHBERGER DOUGLAS ARTHUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US7846497B2Dec 7, 2010

Method and apparatus for controlling gas flow to a processing chamber

APPLIED MATERIALS INC37 citations90

US7775236B2Aug 17, 2010

Method and apparatus for controlling gas flow to a processing chamber

APPLIED MATERIALS INC25 citations90

GOLD EZRA ROBERT

1 patent

US8074677B2Dec 13, 2011

Method and apparatus for controlling gas flow to a processing chamber

GOLD EZRA ROBERT19 citations78