Inventor
SALINAS MARTIN J
US8 patents
⚠️ This page may combine multiple inventors who share the name “SALINAS MARTIN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7846497B2Dec 7, 2010
Method and apparatus for controlling gas flow to a processing chamber
APPLIED MATERIALS INC37 citations90
US7775236B2Aug 17, 2010
Method and apparatus for controlling gas flow to a processing chamber
APPLIED MATERIALS INC25 citations90
US10815562B2Oct 27, 2020
Plasma erosion resistant thin film coating for high temperature application
APPLIED MATERIALS INC4 citations84
US9976211B2May 22, 2018
Plasma erosion resistant thin film coating for high temperature application
APPLIED MATERIALS INC10 citations84
US11773479B2Oct 3, 2023
Plasma erosion resistant thin film coating for high temperature application
APPLIED MATERIALS INC0 citations62