Inventor

LEE CHONG-TAT

SG3 patents

⚠️ This page may combine multiple inventors who share the name “LEE CHONG-TAT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

2 patents

US8021492B2Sep 20, 2011

Method of cleaning turbo pump and chamber/turbo pump clean process

UNITED MICROELECTRONICS CORP2 citations52

US7931752B2Apr 26, 2011

Method for cleaning semiconductor equipment

UNITED MICROELECTRONICS CORP0 citations34

POH KIAN-SOONG

1 patent

US8277567B2Oct 2, 2012

Method of cleaning turbo pump and chamber/turbo pump clean process

POH KIAN-SOONG0 citations35