Inventor
CHOO BRYAN K
US28 patents
Patents
28 patentsUS6591658B1Jul 15, 2003
Carbon nanotubes as linewidth standards for SEM & AFM
ADVANCED MICRO DEVICES INC61 citations96
US6437329B1Aug 20, 2002
Use of carbon nanotubes as chemical sensors by incorporation of fluorescent molecules within the tube
ADVANCED MICRO DEVICES INC65 citations96
US6354133B1Mar 12, 2002
Use of carbon nanotubes to calibrate conventional tips used in AFM
ADVANCED MICRO DEVICES INC66 citations96
US6516528B1Feb 11, 2003
System and method to determine line edge roughness and/or linewidth
ADVANCED MICRO DEVICES INC34 citations93
US6507474B1Jan 14, 2003
Using localized ionizer to reduce electrostatic charge from wafer and mask
ADVANCED MICRO DEVICES INC21 citations93
US6459482B1Oct 1, 2002
Grainless material for calibration sample
ADVANCED MICRO DEVICES INC32 citations93
US6451512B1Sep 17, 2002
UV-enhanced silylation process to increase etch resistance of ultra thin resists
ADVANCED MICRO DEVICES INC36 citations93
US6884999B1Apr 26, 2005
Use of scanning probe microscope for defect detection and repair
ADVANCED MICRO DEVICES INC39 citations92
US6829380B1Dec 7, 2004
Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM system
ADVANCED MICRO DEVICES INC26 citations92
US6566655B1May 20, 2003
Multi-beam SEM for sidewall imaging
ADVANCED MICRO DEVICES INC44 citations92
US6634805B1Oct 21, 2003
Parallel plate development
ADVANCED MICRO DEVICES INC16 citations84
US6479820B1Nov 12, 2002
Electrostatic charge reduction of photoresist pattern on development track
ADVANCED MICRO DEVICES INC17 citations84
US6319643B1Nov 20, 2001
Conductive photoresist pattern for long term calibration of scanning electron microscope
ADVANCED MICRO DEVICES INC17 citations84
US6912438B2Jun 28, 2005
Using scatterometry to obtain measurements of in circuit structures
ADVANCED MICRO DEVICES INC9 citations74
US6635874B1Oct 21, 2003
Self-cleaning technique for contamination on calibration sample in SEM
ADVANCED MICRO DEVICES INC11 citations74
US6632283B1Oct 14, 2003
System and method for illuminating a semiconductor processing system
ADVANCED MICRO DEVICES INC7 citations74
US6572252B1Jun 3, 2003
System and method for illuminating a semiconductor processing system
ADVANCED MICRO DEVICES INC12 citations74
US6559446B1May 6, 2003
System and method for measuring dimensions of a feature having a re-entrant profile
ADVANCED MICRO DEVICES INC9 citations74
US6462343B1Oct 8, 2002
System and method of providing improved CD-SEM pattern recognition of structures with variable contrast
ADVANCED MICRO DEVICES INC10 citations74
US6455847B1Sep 24, 2002
Carbon nanotube probes in atomic force microscope to detect partially open/closed contacts
ADVANCED MICRO DEVICES INC11 citations74
US6444381B1Sep 3, 2002
Electron beam flood exposure technique to reduce the carbon contamination
ADVANCED MICRO DEVICES INC7 citations74
US6396059B1May 28, 2002
Using a crystallographic etched silicon sample to measure and control the electron beam width of a SEM
ADVANCED MICRO DEVICES INC13 citations74
US6373053B1Apr 16, 2002
Analysis of CD-SEM signal to detect scummed/closed contact holes and lines
ADVANCED MICRO DEVICES INC12 citations74
US6190062B1Feb 20, 2001
Cleaning chamber built into SEM for plasma or gaseous phase cleaning
ADVANCED MICRO DEVICES INC12 citations74
US6479817B1Nov 12, 2002
Cantilever assembly and scanning tip therefor with associated optical sensor
ADVANCED MICRO DEVICES INC10 citations72
US6452161B1Sep 17, 2002
Scanning probe microscope having optical fiber spaced from point of hp
ADVANCED MICRO DEVICES INC13 citations72
US6423479B1Jul 23, 2002
Cleaning carbon contamination on mask using gaseous phase
ADVANCED MICRO DEVICES INC5 citations63
US6371134B2Apr 16, 2002
Ozone cleaning of wafers
ADVANCED MICRO DEVICES INC3 citations63