Inventor
FOX KEITH
US20 patents
⚠️ This page may combine multiple inventors who share the name “FOX KEITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
9 patentsUS7622400B1Nov 24, 2009
Method for improving mechanical properties of low dielectric constant materials
NOVELLUS SYSTEMS INC42 citations92
US7695765B1Apr 13, 2010
Methods for producing low-stress carbon-doped oxide films with improved integration properties
NOVELLUS SYSTEMS INC22 citations86
US8895415B1Nov 25, 2014
Tensile stressed doped amorphous silicon
NOVELLUS SYSTEMS INC14 citations83
US9028924B2May 12, 2015
In-situ deposition of film stacks
NOVELLUS SYSTEMS INC7 citations82
US10214816B2Feb 26, 2019
PECVD apparatus for in-situ deposition of film stacks
NOVELLUS SYSTEMS INC6 citations81
US11746420B2Sep 5, 2023
PECVD apparatus for in-situ deposition of film stacks
NOVELLUS SYSTEMS INC1 citations72
US9165788B2Oct 20, 2015
Post-deposition soft annealing
NOVELLUS SYSTEMS INC4 citations69
US12385138B2Aug 12, 2025
Plasma-enhanced deposition of film stacks
NOVELLUS SYSTEMS INC0 citations60
US9388491B2Jul 12, 2016
Method for deposition of conformal films with catalysis assisted low temperature CVD
NOVELLUS SYSTEMS INC1 citations52
LAM RES CORP
3 patentsUS12341002B2Jun 24, 2025
Low stress films for advanced semiconductor applications
LAM RES CORP1 citations57
US10161034B2Dec 25, 2018
Rapid chamber clean using concurrent in-situ and remote plasma sources
LAM RES CORP1 citations48
US10358717B2Jul 23, 2019
Method for depositing high deposition rate, thick tetraethyl orthosilicate film with low compressive stress, high film stability and low shrinkage
LAM RES CORP0 citations36