Inventor

ENDO EIKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “ENDO EIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US11569112B2Jan 31, 2023

Substrate processing apparatus and method of opening/closing lid of substrate accommodating vessel

TOKYO ELECTRON LTD0 citations40

ENDO EIKI

1 patent

US9002494B2Apr 7, 2015

Substrate transfer method and storage medium

ENDO EIKI0 citations25