Inventor
GALARZA CECILIA
US4 patents
⚠️ This page may combine multiple inventors who share the name “GALARZA CECILIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6684114B1Jan 27, 2004
Efficient adaptive feedforward periodic disturbance compensation
TOKYO ELECTRON LTD27 citations91
US6947876B1Sep 20, 2005
Method for automated system identification
TOKYO ELECTRON LTD24 citations90
US6922596B2Jul 26, 2005
Efficient adaptive feedforward periodic disturbance compensation
TOKYO ELECTRON LTD15 citations82