P

Inventor

KUBOTA YOSHIHIRO

JP136 patents
⚠️ This page may combine multiple inventors who share the name “KUBOTA YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

33 patents
US5643483AJul 1, 1997

Ceramic heater made of fused silica glass having roughened surface

SHINETSU CHEMICAL CO69 citations96
US5382469AJan 17, 1995

Ceramic-titanium nitride electrostatic chuck

SHINETSU CHEMICAL CO67 citations96
US5324053AJun 28, 1994

Electrostatic chuck

SHINETSU CHEMICAL CO57 citations96
US6122159ASep 19, 2000

Electrostatic holding apparatus

SHINETSU CHEMICAL CO23 citations93
US5834143ANov 10, 1998

Frame-supported dustproof pellicle for photolithographic photomask

SHINETSU CHEMICAL CO26 citations93
US5607541AMar 4, 1997

Electrostatic chuck

SHINETSU CHEMICAL CO30 citations93
US5378514AJan 3, 1995

Frame-supported pellicle for photolithography

SHINETSU CHEMICAL CO36 citations93
US5286567AFeb 15, 1994

Pellicle for photolithographic mask

SHINETSU CHEMICAL CO34 citations93
US6376977B1Apr 23, 2002

Silicon electrode plate

SHINETSU CHEMICAL CO27 citations92
US5693382ADec 2, 1997

Frame-supported pellicle for dustproof protection of photomask in photolithography

SHINETSU CHEMICAL CO36 citations92
US5691088ANov 25, 1997

Pellicle for protection of photolithographic mask

SHINETSU CHEMICAL CO26 citations92
US5616927AApr 1, 1997

Frame-supported pellicle for dustproof protection of photomask

SHINETSU CHEMICAL CO30 citations92
US5209996AMay 11, 1993

Membrane consisting of silicon carbide and silicon nitride, method for the preparation thereof and mask for X-ray lithography utilizing the same

SHINETSU CHEMICAL CO27 citations92
US5470621ANov 28, 1995

Frame-supported pellicle for dustproof protection of photomask

SHINETSU CHEMICAL CO34 citations91
US4395512AJul 26, 1983

Polyphenylenesulfide resin composition

SHINETSU CHEMICAL CO44 citations91
US8030176B2Oct 4, 2011

Method for preparing substrate having monocrystalline film

SHINETSU CHEMICAL CO10 citations84
US7855127B2Dec 21, 2010

Method for manufacturing semiconductor substrate

SHINETSU CHEMICAL CO12 citations84
US6509124B1Jan 21, 2003

Method of producing diamond film for lithography

SHINETSU CHEMICAL CO13 citations84
US5300348AApr 5, 1994

Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive

SHINETSU CHEMICAL CO20 citations84
US7951513B2May 31, 2011

Pellicle and method for producing pellicle

SHINETSU CHEMICAL CO16 citations83
US7901846B2Mar 8, 2011

Pellicle and method for manufacturing the same

SHINETSU CHEMICAL CO14 citations79
US5597669AJan 28, 1997

Frame-supported pellicle for photolithography

SHINETSU CHEMICAL CO14 citations74
US5370951ADec 6, 1994

Frame-supported pellicle for protection of photolithographic mask

SHINETSU CHEMICAL CO16 citations74
US5327808AJul 12, 1994

Method for the preparation of a frame-supported pellicle for photolithography

SHINETSU CHEMICAL CO14 citations74
US5199055AMar 30, 1993

X-ray lithographic mask blank with reinforcement

SHINETSU CHEMICAL CO14 citations74
US5118573AJun 2, 1992

Magneto-optical recording medium

SHINETSU CHEMICAL CO10 citations74
US4734386AMar 29, 1988

Boron nitride dopant source for diffusion doping

SHINETSU CHEMICAL CO10 citations74
US10711373B2Jul 14, 2020

SiC composite substrate and method for manufacturing same

SHINETSU CHEMICAL CO2 citations73
US10612157B2Apr 7, 2020

Method for manufacturing SiC composite substrate, and method for manufacturing semiconductor substrate

SHINETSU CHEMICAL CO4 citations73
US11069560B2Jul 20, 2021

Method of transferring device layer to transfer substrate and highly thermal conductive substrate

SHINETSU CHEMICAL CO4 citations72
US9837301B2Dec 5, 2017

Method for producing hybrid substrates, and hybrid substrate

SHINETSU CHEMICAL CO5 citations72
US9741603B2Aug 22, 2017

Method for producing hybrid substrate, and hybrid substrate

SHINETSU CHEMICAL CO2 citations72
US9646873B2May 9, 2017

Method for producing SOS substrates, and SOS substrate

SHINETSU CHEMICAL CO2 citations72

FUJITSU LTD

9 patents

AKIYAMA SHOJI

3 patents

WATANABE HIROMASA

2 patents

NIPPON CHEMICAL IND

1 patent

JAPAN CHEMICAL INNOVATION INST

1 patent

KANO SHOJI

1 patent

Showing the top 50 of 136 patents by PatentIndex Score.