Inventor
OGIHARA KATSUYA
JP6 patents
Patents
6 patentsUS11612869B2Mar 28, 2023
Production method for trichlorosilane, and pipe
TOKUYAMA CORP0 citations58
US11241666B2Feb 8, 2022
Reactor and production method of trichlorosilane
TOKUYAMA CORP0 citations58
US11071961B2Jul 27, 2021
Fluidized bed reaction container and method for producing trichlorosilane
TOKUYAMA CORP0 citations58
US10933396B2Mar 2, 2021
Fluidized bed reactor
TOKUYAMA CORP0 citations58
US12221352B2Feb 11, 2025
Chlorosilane producing method
TOKUYAMA CORP0 citations56
US11007499B2May 18, 2021
Fluidized-bed-type reactor, and method for manufacturing trichlorosilane
TOKUYAMA CORP0 citations47