Inventor

WU TSUNG FENG

US4 patents

⚠️ This page may combine multiple inventors who share the name “WU TSUNG FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US11668602B2Jun 6, 2023

Spatial optical emission spectroscopy for etch uniformity

APPLIED MATERIALS INC2 citations71

US12405164B2Sep 2, 2025

Spatial optical emission spectroscopy for etch uniformity

APPLIED MATERIALS INC0 citations60

LO YU-HWA

1 patent

US9074978B2Jul 7, 2015

Optical space-time coding technique in microfluidic devices

LO YU-HWA21 citations87

NANOCELLECT BIOMEDICAL INC

1 patent

US10816550B2Oct 27, 2020

Systems, apparatus, and methods for sorting particles

NANOCELLECT BIOMEDICAL INC10 citations73