Inventor
HE JIALAN
CN5 patents
Patents
5 patentsUS10892280B2Jan 12, 2021
Inter-deck plug in three-dimensional memory device and method for forming the same
YANGTZE MEMORY TECH CO LTD3 citations70
US10741578B2Aug 11, 2020
Inter-deck plug in three-dimensional memory device and method for forming the same
YANGTZE MEMORY TECH CO LTD3 citations70
US10763099B2Sep 1, 2020
Wafer flatness control using backside compensation structure
YANGTZE MEMORY TECH CO LTD1 citations61
US11791229B2Oct 17, 2023
Protection structures in semiconductor chips and methods for forming the same
YANGTZE MEMORY TECH CO LTD0 citations56
US11710717B2Jul 25, 2023
Methods for multi-wafer stacking and dicing
YANGTZE MEMORY TECH CO LTD0 citations56