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Inventor
RAU CHRISTOPHER J
US
2 patents
⚠️ This page may combine multiple inventors who share the name “RAU CHRISTOPHER J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
1 patent
US6200412B1
Mar 13, 2001
Chemical vapor deposition system including dedicated cleaning gas injection
NOVELLUS SYSTEMS INC
181 citations
94
LAM RES CORP
1 patent
US12460294B2
Nov 4, 2025
Heater design solutions for chemical delivery systems
LAM RES CORP
2 citations
65