Inventor
PARK JUHYUK
KR5 patents
⚠️ This page may combine multiple inventors who share the name “PARK JUHYUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
4 patentsUS11866823B2Jan 9, 2024
Substrate supporting unit and a substrate processing device including the same
ASM IP HOLDING BV0 citations59
US11499226B2Nov 15, 2022
Substrate supporting unit and a substrate processing device including the same
ASM IP HOLDING BV0 citations59
US12550638B2Feb 10, 2026
Substrate processing method
ASM IP HOLDING BV0 citations56
US12424435B2Sep 23, 2025
Substrate processing method
ASM IP HOLDING BV0 citations52