Inventor
SUGIYAMA MISUO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SUGIYAMA MISUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM CO LTD
5 patentsUS6273803B1Aug 14, 2001
Carriers and polishing apparatus
SPEEDFAM CO LTD57 citations95
US5099614AMar 31, 1992
Flat lapping machine with sizing mechanism
SPEEDFAM CO LTD97 citations95
US6012964AJan 11, 2000
Carrier and CMP apparatus
SPEEDFAM CO LTD73 citations93
US4805348AFeb 21, 1989
Flat lapping machine
SPEEDFAM CO LTD50 citations88
US6210260B1Apr 3, 2001
Carrier and CMP apparatus
SPEEDFAM CO LTD19 citations83