Inventor
RAVID AVI
US5 patents
Patents
5 patentsUS6556947B1Apr 29, 2003
Optical measurements of patterned structures
NOVA MEASURING INSTR LTD79 citations96
US6292265B1Sep 18, 2001
Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects
NOVA MEASURING INSTR LTD56 citations95
US6801326B2Oct 5, 2004
Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects
NOVA MEASURING INSTR LTD13 citations83
US6654108B2Nov 25, 2003
Test structure for metal CMP process control
NOVA MEASURING INSTR LTD12 citations71
US6885446B2Apr 26, 2005
Method and system for monitoring a process of material removal from the surface of a patterned structure
NOVA MEASURING INSTR LTD6 citations61