Inventor
KUMEKAWA MASAYUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KUMEKAWA MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
11 patentsUS6558518B1May 6, 2003
Method and apparatus for plating substrate and plating facility
EBARA CORP36 citations91
US7208076B2Apr 24, 2007
Substrate processing apparatus and method
EBARA CORP10 citations83
US7101465B2Sep 5, 2006
Electrolytic processing device and substrate processing apparatus
EBARA CORP14 citations83
US7585205B2Sep 8, 2009
Substrate polishing apparatus and method
EBARA CORP7 citations73
US7083706B2Aug 1, 2006
Substrate processing apparatus
EBARA CORP9 citations72
US7655118B2Feb 2, 2010
Electrolytic processing apparatus and method
EBARA CORP4 citations62
US7638030B2Dec 29, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP3 citations62
US7427345B2Sep 23, 2008
Method and device for regenerating ion exchanger, and electrolytic processing apparatus
EBARA CORP3 citations62
US7166204B2Jan 23, 2007
Plating apparatus and method
EBARA CORP4 citations61
US7976362B2Jul 12, 2011
Substrate polishing apparatus and method
EBARA CORP1 citations52
US7569135B2Aug 4, 2009
Electrolytic processing apparatus and substrate processing apparatus and method
EBARA CORP0 citations52