Inventor

ZACH FRANZ X

US9 patents

⚠️ This page may combine multiple inventors who share the name “ZACH FRANZ X”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INVARIUM INC

3 patents

US7444615B2Oct 28, 2008

Calibration on wafer sweet spots

INVARIUM INC25 citations90

US7246343B2Jul 17, 2007

Method for correcting position-dependent distortions in patterning of integrated circuits

INVARIUM INC10 citations82

US7189481B2Mar 13, 2007

Characterizing flare of a projection lens

INVARIUM INC0 citations51

IBM

3 patents

US6132940AOct 17, 2000

Method for producing constant profile sidewalls

IBM14 citations72

US6485894B1Nov 26, 2002

Method to self-align a lithographic pattern to a workpiece

IBM3 citations62

US7124396B2Oct 17, 2006

Alternating phase-shift mask rule compliant IC design

IBM0 citations50

CADENCE DESIGN SYSTEMS INC

2 patents

US7600212B2Oct 6, 2009

Method of compensating photomask data for the effects of etch and lithography processes

CADENCE DESIGN SYSTEMS INC39 citations89

US7588868B2Sep 15, 2009

Method and system for reducing the impact of across-wafer variations on critical dimension measurements

CADENCE DESIGN SYSTEMS INC18 citations83

INFINEON TECHNOLOGIES AG

1 patent

US6927172B2Aug 9, 2005

Process to suppress lithography at a wafer edge

INFINEON TECHNOLOGIES AG10 citations71