P

Inventor

KITANO TAKAHIRO

JP113 patents
⚠️ This page may combine multiple inventors who share the name “KITANO TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

37 patents
US6416583B1Jul 9, 2002

Film forming apparatus and film forming method

TOKYO ELECTRON LTD128 citations99
US6627263B2Sep 30, 2003

Film forming apparatus and film forming method

TOKYO ELECTRON LTD95 citations98
US6676757B2Jan 13, 2004

Coating film forming apparatus and coating unit

TOKYO ELECTRON LTD60 citations96
US6383948B1May 7, 2002

Coating film forming apparatus and coating film forming method

TOKYO ELECTRON LTD57 citations96
US6371667B1Apr 16, 2002

Film forming method and film forming apparatus

TOKYO ELECTRON LTD76 citations96
US5968268AOct 19, 1999

Coating apparatus and coating method

TOKYO ELECTRON LTD61 citations96
US6633022B2Oct 14, 2003

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD21 citations93
US6632281B2Oct 14, 2003

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD15 citations93
US6585430B2Jul 1, 2003

System and method for coating and developing

TOKYO ELECTRON LTD42 citations93
US6518199B2Feb 11, 2003

Method and system for coating and developing

TOKYO ELECTRON LTD31 citations93
US6200633B1Mar 13, 2001

Coating apparatus and coating method

TOKYO ELECTRON LTD42 citations93
US6059880AMay 9, 2000

Coating apparatus

TOKYO ELECTRON LTD56 citations93
US7797855B2Sep 21, 2010

Heating apparatus, and coating and developing apparatus

TOKYO ELECTRON LTD30 citations92
US6884294B2Apr 26, 2005

Coating film forming method and apparatus

TOKYO ELECTRON LTD16 citations92
US6872256B2Mar 29, 2005

Film forming unit

TOKYO ELECTRON LTD25 citations92
US6824616B2Nov 30, 2004

Substrate processing method and substrate processing system

TOKYO ELECTRON LTD20 citations92
US6796054B2Sep 28, 2004

Low-pressure dryer and low-pressure drying method

TOKYO ELECTRON LTD30 citations92
US6776845B2Aug 17, 2004

Coating film forming method and system

TOKYO ELECTRON LTD16 citations92
US6695922B2Feb 24, 2004

Film forming unit

TOKYO ELECTRON LTD32 citations92
US6616760B2Sep 9, 2003

Film forming unit

TOKYO ELECTRON LTD28 citations92
US6605153B2Aug 12, 2003

Coating film forming apparatus

TOKYO ELECTRON LTD26 citations92
US6599366B1Jul 29, 2003

Substrate processing unit and processing method

TOKYO ELECTRON LTD32 citations92
US6537373B1Mar 25, 2003

Method of forming film and apparatus thereof

TOKYO ELECTRON LTD36 citations92
US6514344B2Feb 4, 2003

Film forming unit

TOKYO ELECTRON LTD28 citations92
US6811613B2Nov 2, 2004

Coating film forming apparatus

TOKYO ELECTRON LTD17 citations91
US6808566B2Oct 26, 2004

Reduced-pressure drying unit and coating film forming method

TOKYO ELECTRON LTD20 citations91
US6536964B1Mar 25, 2003

Substrate processing system and substrate processing method

TOKYO ELECTRON LTD25 citations89
US7060939B2Jun 13, 2006

Substrate heating method, substrate heating system, and applying developing system

TOKYO ELECTRON LTD11 citations84
US6966949B2Nov 22, 2005

Apparatus and method for drying under reduced pressure, and coating film forming apparatus

TOKYO ELECTRON LTD12 citations84
US6875281B2Apr 5, 2005

Method and system for coating and developing

TOKYO ELECTRON LTD12 citations84
US6716478B2Apr 6, 2004

Coating film forming apparatus and coating film forming method

TOKYO ELECTRON LTD17 citations84
US6467976B2Oct 22, 2002

Coating and developing system

TOKYO ELECTRON LTD18 citations84
US6860945B2Mar 1, 2005

Substrate coating unit and substrate coating method

TOKYO ELECTRON LTD12 citations83
US6773510B2Aug 10, 2004

Substrate processing unit

TOKYO ELECTRON LTD17 citations83
US6761125B2Jul 13, 2004

Coating film forming system

TOKYO ELECTRON LTD14 citations82
US7024798B2Apr 11, 2006

Low-pressure dryer and low-pressure drying method

TOKYO ELECTRON LTD10 citations74
US6986214B2Jan 17, 2006

Low-pressure dryer and low-pressure drying method

TOKYO ELECTRON LTD9 citations74

NIPPON CATALYTIC CHEM IND

4 patents

KITANO TAKAHIRO

3 patents

FUJI OIL CO LTD

1 patent

TAKIGUCHI YASUSHI

1 patent

KANEBO LTD

1 patent

MIYAKE KOJI

1 patent

IBIDEN COMPANY LTD

1 patent

KYOCERA CORP

1 patent

Showing the top 50 of 113 patents by PatentIndex Score.