Inventor
KAWAFUCHI YOSHIYUKI
JP4 patents
Patents
4 patentsUS6811613B2Nov 2, 2004
Coating film forming apparatus
TOKYO ELECTRON LTD17 citations91
US6860945B2Mar 1, 2005
Substrate coating unit and substrate coating method
TOKYO ELECTRON LTD12 citations83
US6761125B2Jul 13, 2004
Coating film forming system
TOKYO ELECTRON LTD14 citations82
US6932868B2Aug 23, 2005
Coating film forming apparatus
TOKYO ELECTRON LTD1 citations51