Inventor
KOGA NORIHISA
JP34 patents
⚠️ This page may combine multiple inventors who share the name “KOGA NORIHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
30 patentsUS6676757B2Jan 13, 2004
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD60 citations96
US6383948B1May 7, 2002
Coating film forming apparatus and coating film forming method
TOKYO ELECTRON LTD57 citations96
US6872256B2Mar 29, 2005
Film forming unit
TOKYO ELECTRON LTD25 citations92
US6616760B2Sep 9, 2003
Film forming unit
TOKYO ELECTRON LTD28 citations92
US6605153B2Aug 12, 2003
Coating film forming apparatus
TOKYO ELECTRON LTD26 citations92
US6514344B2Feb 4, 2003
Film forming unit
TOKYO ELECTRON LTD28 citations92
US6811613B2Nov 2, 2004
Coating film forming apparatus
TOKYO ELECTRON LTD17 citations91
US6716478B2Apr 6, 2004
Coating film forming apparatus and coating film forming method
TOKYO ELECTRON LTD17 citations84
US7919727B2Apr 5, 2011
Laser processing apparatus and laser processing method
TOKYO ELECTRON LTD10 citations83
US7710582B2May 4, 2010
Laser processing apparatus and laser processing method for cutting and removing a part of a surface region of a substrate
TOKYO ELECTRON LTD11 citations83
US7473321B2Jan 6, 2009
Laser treatment apparatus
TOKYO ELECTRON LTD9 citations83
US6761125B2Jul 13, 2004
Coating film forming system
TOKYO ELECTRON LTD14 citations82
US7622000B2Nov 24, 2009
Laser processing apparatus and laser processing method
TOKYO ELECTRON LTD7 citations73
US7087118B2Aug 8, 2006
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD6 citations73
US6936107B2Aug 30, 2005
Coating film forming apparatus and coating unit
TOKYO ELECTRON LTD11 citations73
US10795265B2Oct 6, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations72
US10707109B2Jul 7, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations70
US7641763B2Jan 5, 2010
Apparatus and method for removing coating film
TOKYO ELECTRON LTD4 citations63
US7332056B2Feb 19, 2008
Thin film removing device and thin film removing method
TOKYO ELECTRON LTD4 citations63
US12501004B2Dec 16, 2025
Substrate imaging apparatus
TOKYO ELECTRON LTD0 citations62
US11832026B2Nov 28, 2023
Substrate imaging apparatus
TOKYO ELECTRON LTD0 citations62
US10958879B2Mar 23, 2021
Substrate imaging apparatus
TOKYO ELECTRON LTD0 citations62
US7518087B2Apr 14, 2009
Laser processing apparatus and laser processing method
TOKYO ELECTRON LTD5 citations62
US11733612B2Aug 22, 2023
Substrate processing apparatus and method of processing substrate
TOKYO ELECTRON LTD0 citations52
US11353792B2Jun 7, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations52
US7879251B2Feb 1, 2011
Thin film removing device and thin film removing method
TOKYO ELECTRON LTD0 citations52
US10523905B2Dec 31, 2019
Substrate imaging apparatus
TOKYO ELECTRON LTD0 citations51
US6932868B2Aug 23, 2005
Coating film forming apparatus
TOKYO ELECTRON LTD1 citations51
US11256172B2Feb 22, 2022
Light irradiating device, light irradiating method and recording medium
TOKYO ELECTRON LTD0 citations48
US10642168B2May 5, 2020
Auxiliary exposure apparatus and exposure amount distribution acquisition method
TOKYO ELECTRON LTD0 citations40