Inventor
TAKEI TOSHICHIKA
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TAKEI TOSHICHIKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6474986B2Nov 5, 2002
Hot plate cooling method and heat processing apparatus
TOKYO ELECTRON LTD71 citations95
US6450805B1Sep 17, 2002
Hot plate cooling method and heat processing apparatus
TOKYO ELECTRON LTD28 citations92
US6811613B2Nov 2, 2004
Coating film forming apparatus
TOKYO ELECTRON LTD17 citations91
US7049553B2May 23, 2006
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD12 citations83
US6644964B2Nov 11, 2003
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD17 citations83
US6761125B2Jul 13, 2004
Coating film forming system
TOKYO ELECTRON LTD14 citations82
US11868056B2Jan 9, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US7431584B2Oct 7, 2008
Heat processing apparatus and heat processing method
TOKYO ELECTRON LTD2 citations62
US7151239B2Dec 19, 2006
Heat treating apparatus and heat treating method
TOKYO ELECTRON LTD2 citations62
US12204256B2Jan 21, 2025
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US6932868B2Aug 23, 2005
Coating film forming apparatus
TOKYO ELECTRON LTD1 citations51